| 1. Identity statement | |
| Reference Type | Journal Article |
| Site | mtc-m16d.sid.inpe.br |
| Holder Code | isadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S |
| Identifier | 8JMKD3MGP7W/37JTRG2 |
| Repository | sid.inpe.br/mtc-m19@80/2010/06.01.17.15 (restricted access) |
| Last Update | 2010:06.01.17.15.28 (UTC) administrator |
| Metadata Repository | sid.inpe.br/mtc-m19@80/2010/06.01.17.15.29 |
| Metadata Last Update | 2018:06.05.04.36.42 (UTC) administrator |
| Secondary Key | INPE--PRE/ |
| DOI | 10.1016/j.surfcoat.2010.03.014 |
| ISSN | 0257-8972 |
| Citation Key | OliveiraGonçUedaRizz:2010:NeHiPl |
| Title | A new high-temperature plasma immersion ion implantation system with electron heating  |
| Year | 2010 |
| Month | June |
| Access Date | 2024, Apr. 28 |
| Secondary Type | PRE PI |
| Number of Files | 1 |
| Size | 567 KiB |
| 2. Context | |
| Author | 1 Oliveira, Rogério de Moraes 2 Gonçalves, José A. N. 3 Ueda, Mário 4 Rizzo, P. N. |
| Resume Identifier | 1 8JMKD3MGP5W/3C9JJ6L 2 3 8JMKD3MGP5W/3C9JHSB |
| Group | 1 LAP-CTE-INPE-MCT-BR 2 LAP-CTE-INPE-MCT-BR 3 LAP-CTE-INPE-MCT-BR 4 LAP-CTE-INPE-MCT-BR |
| Affiliation | 1 Instituto Nacional de Pesquisas Espaciais (INPE) 2 Instituto Nacional de Pesquisas Espaciais (INPE) 3 Instituto Nacional de Pesquisas Espaciais (INPE) 4 Instituto Nacional de Pesquisas Espaciais (INPE) |
| Journal | Surface and Coatings Technology |
| Volume | 204 |
| Number | 18-19 |
| Pages | 3009-3012 |
| Secondary Mark | B2_ASTRONOMIA_/_FÍSICA A1_ENGENHARIAS_II A2_ENGENHARIAS_III B1_ENGENHARIAS_IV A2_GEOCIÊNCIAS A1_INTERDISCIPLINAR A1_MATERIAIS B1_MEDICINA_II B2_QUÍMICA |
| History (UTC) | 2010-07-05 14:54:45 :: simone -> marciana :: 2010 2011-04-13 22:57:13 :: marciana -> administrator :: 2010 2018-06-05 04:36:42 :: administrator -> marciana :: 2010 |
| 3. Content and structure | |
| Is the master or a copy? | is the master |
| Content Stage | completed |
| Transferable | 1 |
| Content Type | External Contribution |
| Keywords | Plasma immersion ion implantation Oxide cathode Ion diffusion |
| Abstract | The temperature of the substrate has strong influence on the diffusion coefficient of nitrogen ions during plasma immersion ion implantation (PIII) performed in metallic surfaces, which affect the ion implantation profiles and can lead to the formation of thick implanted layers. In order to heat conveniently a large spectrum of metals and metallic alloys in vacuum and in the presence of plasma, as mandatory for efficient PIII, it is necessary to count on a stable heat source, able to provide steady temperatures in the range of 200 °C to more than 1000 °C. This has been accomplished in the current experiment by means of a thermionic cathode composed of a rolled tantalum foil covered with (Ba,Sr,Ca)O. Work-function of this electron source is around 2.1 eV, which is much lower than 4.5 eV of typically used tungsten filament. Metallic samples studied, in this case, are the anode of the discharge itself, being polarized during the heating cycle by positive DC voltages in the 100800 V range. They are implanted with negative pulses up to 10 kV/300 Hz/40 µs. |
| Area | FISPLASMA |
| Arrangement | urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > A new high-temperature... |
| doc Directory Content | access |
| source Directory Content | there are no files |
| agreement Directory Content | there are no files |
| 4. Conditions of access and use | |
| Language | en |
| Target File | a new high temperature.pdf |
| User Group | administrator marciana simone |
| Visibility | shown |
| Archiving Policy | denypublisher denyfinaldraft24 |
| Read Permission | deny from all and allow from 150.163 |
| Update Permission | not transferred |
| 5. Allied materials | |
| Mirror Repository | sid.inpe.br/mtc-m19@80/2009/08.21.17.02.53 |
| Next Higher Units | 8JMKD3MGPCW/3ET2RFS |
| Dissemination | WEBSCI; PORTALCAPES. |
| Host Collection | sid.inpe.br/mtc-m19@80/2009/08.21.17.02 |
| 6. Notes | |
| Notes | The Tenth International Workshop on Plasma-Based Ion Implantation and Deposition, São José dos Campos, SP, Brazil 07-11 September 2009 Edited by Joaquim J. Barroso and Mario Ueda |
| Empty Fields | alternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress electronicmailaddress format isbn label lineage mark nextedition orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype |
| 7. Description control | |
| e-Mail (login) | marciana |
| update | |