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1. Identity statement
Reference TypeJournal Article
Sitemtc-m16d.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP7W/37JU2K5
Repositorysid.inpe.br/mtc-m19@80/2010/06.01.18.05   (restricted access)
Last Update2010:06.01.18.05.54 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m19@80/2010/06.01.18.05.55
Metadata Last Update2018:06.05.04.36.43 (UTC) administrator
Secondary KeyINPE--PRE/
DOI10.1016/j.diamond.2010.01.042
ISSN0925-9635
Citation KeyMirandaBraBalBelFer:2010:ImCVPr
TitleImprovements in CVD/CVI processes for optimizing nanocrystalline diamond growth into porous silicon
Year2010
MonthJuly-Sept.
Access Date2024, Apr. 28
Secondary TypePRE PI
Number of Files1
Size506 KiB
2. Context
Author1 Miranda, C. R. B.
2 Braga, N. A.
3 Baldan, Maurício Ribeiro
4 Beloto, Antonio Fernando
5 Ferreira, Neidenei Gomes
Resume Identifier1
2
3 8JMKD3MGP5W/3C9JHTA
4 8JMKD3MGP5W/3C9JGJ8
5 8JMKD3MGP5W/3C9JHU3
Group1 LAS-CTE-INPE-MCT-BR
2 LAS-CTE-INPE-MCT-BR
3 LAS-CTE-INPE-MCT-BR
4 LAS-CTE-INPE-MCT-BR
5 LAS-CTE-INPE-MCT-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
5 Instituto Nacional de Pesquisas Espaciais (INPE)
JournalDiamond and Related Materials
Volume19
Number7 Sp. Iss. SI
Pages760-763
Secondary MarkB2_ASTRONOMIA_/_FÍSICA A1_ENGENHARIAS_II A2_ENGENHARIAS_III A1_ENGENHARIAS_IV A1_MATERIAIS B1_QUÍMICA
History (UTC)2010-07-05 14:54:46 :: simone -> marciana :: 2010
2011-04-17 20:26:50 :: marciana -> administrator :: 2010
2018-06-05 04:36:43 :: administrator -> marciana :: 2010
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
KeywordsNanodiamond
Porous silicon
Chemical vapor infiltration
AbstractThis paper reports a novel procedure to infiltrate nanocrystalline diamond films (NCD) on porous silicon (PS) substrate. The NCD/PS films resulted in a composite material, with great potential for electrochemical application, mainly due to its high active surface area. The Hot Filament Chemical Vapor Deposition reactor was changed to Hot Filament Chemical Vapor Infiltration reactor in order to grow NCD films infiltrated into deep holes of PS substrate. This procedure allowed the infiltration of the reacting gases into the porous structure where the nucleation takes place, followed by the coalescence and film formation at pore bottoms and walls. In this configuration an additional entrance of CH4 was located next to the PS substrate using two distinct positions called underneath and above, with the use of the additional flow accurately underneath or above of the samples. In general, the combination of these two configurations with additional carbon sources provided NCD film infiltration in PS substrate with success with only 60 min of growing time. Particularly, the films obtained from the positions called above presented the best morphology, with high quality and crystallinity, confirmed from its scanning electron microscopy, Raman scattering spectroscopy and high resolution X-ray diffraction spectra, respectively.
AreaFISMAT
Arrangementurlib.net > LABAS > Improvements in CVD/CVI...
doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Contentthere are no files
4. Conditions of access and use
Languageen
Target Fileimprovements in cvd.pdf
User Groupadministrator
marciana
simone
Visibilityshown
Archiving Policydenypublisher denyfinaldraft24
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Mirror Repositorysid.inpe.br/mtc-m19@80/2009/08.21.17.02.53
Next Higher Units8JMKD3MGPCW/3ESR3H2
DisseminationWEBSCI; PORTALCAPES; COMPENDEX.
Host Collectionsid.inpe.br/mtc-m19@80/2009/08.21.17.02
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress electronicmailaddress format isbn label lineage mark nextedition notes orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate session shorttitle sponsor subject tertiarymark tertiarytype typeofwork url versiontype
7. Description control
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