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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3SFU3B2
Repositorysid.inpe.br/mtc-m21c/2019/01.02.17.42   (restricted access)
Last Update2019:01.02.17.42.17 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m21c/2019/01.02.17.42.17
Metadata Last Update2021:02.03.17.56.12 (UTC) administrator
DOI10.1016/j.surfcoat.2018.12.011
ISSN0257-8972
Citation KeyPillacaRamGutLugTra:2019:DLDeIn
TitleDLC deposition inside of a long tube by using the pulsed-DC PECVD process
Year2019
MonthFeb.
Access Date2024, May 08
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size1392 KiB
2. Context
Author1 Pillaca, Elver Juan de Dios Mitma
2 Ramírez Ramos, Marco Antonio
3 Gutierrez Bernal, Jesús Manuel
4 Lugo González, Dubrazkha Carolina
5 Trava-Airoldi, Vladimir Jesus
Group1 CMS-ETES-SESPG-INPE-MCTIC-GOV-BR
2 CMS-ETES-SESPG-INPE-MCTIC-GOV-BR
3
4 COLIT-COLIT-INPE-MCTIC-GOV-BR
5 LABAS-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Universidad Nacional de Colombia
4 Instituto Nacional de Pesquisas Espaciais (INPE)
5 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 elver.mitma@inpe.br
2
3
4 carolina.lugo@inpe.br
5 vladimir.airoldi@inpe.br
JournalSurface and Coatings Technology
Volume359
Pages55-61
Secondary MarkA1_MATERIAIS A1_ENGENHARIAS_II A2_SAÚDE_COLETIVA A2_INTERDISCIPLINAR A2_GEOCIÊNCIAS A2_ENGENHARIAS_III B1_ODONTOLOGIA B1_MEDICINA_II B1_ENGENHARIAS_IV B1_ASTRONOMIA_/_FÍSICA B2_QUÍMICA B2_CIÊNCIAS_BIOLÓGICAS_I
History (UTC)2019-01-02 17:42:17 :: simone -> administrator ::
2019-01-02 17:42:18 :: administrator -> simone :: 2018
2019-01-02 17:43:20 :: simone :: 2018 -> 2019
2019-01-02 17:43:20 :: simone -> administrator :: 2019
2021-02-03 17:56:12 :: administrator -> simone :: 2019
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsElectric discharge
DLC
PECVD
Coating inside of the tube
Temperature
AbstractIn this study, the pulsed-DC PECVD deposition system was used to produce Diamond-like carbon (DLC) film on the internal surface of a long metal tube (200 cm in length and 10 cm in diameter) employed as the deposition chamber itself. Firstly, the features of plasma discharges and the temperature distribution along the tube external surface were studied using argon, silane, and acetylene. The experimental results demonstrate that a stable discharge can be established inside the tube. It was found that when the precursor gas is employed, a temperature gradient on the tube surface is formed. Secondly, PECVD experiments regarding DLC film deposition inside the inner surface of the tube are described. For this purpose, polished stainless steel and silicon wafer samples were mounted on the inside tube surface for subsequent analysis of the coatings. It was found that the growth rate and the structure properties of the DLC film varied along the axial direction of the tube. However, surfaces of DLC film with high sp3 content provided better tribological characteristics. These results were mainly attributed to complex processes of local dissociation and activation happened by collision between the electrons and neutrals.
AreaFISMAT
Arrangement 1urlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > DLC deposition inside...
Arrangement 2urlib.net > BDMCI > Fonds > Produção pgr ATUAIS > CMS > DLC deposition inside...
Arrangement 3DLC deposition inside...
doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Content
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4. Conditions of access and use
Languageen
Target Filepillaca_dlc.pdf
User Groupsimone
Visibilityshown
Archiving Policydenypublisher denyfinaldraft24
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ESR3H2
8JMKD3MGPCW/3F358GL
8JMKD3MGPCW/444BQ9E
DisseminationWEBSCI; PORTALCAPES; COMPENDEX.
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
Empty Fieldsalternatejournal archivist callnumber copyholder copyright creatorhistory descriptionlevel e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup resumeid rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url
7. Description control
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