Close
Metadata

1. Identity statement
Reference TypeJournal Article
Sitemtc-m21c.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP3W34R/3SMPHSL
Repositorysid.inpe.br/mtc-m21c/2019/02.07.15.03   (restricted access)
Last Update2019:02.07.15.03.29 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m21c/2019/02.07.15.03.29
Metadata Last Update2020:01.06.11.42.08 (UTC) administrator
DOI10.1016/j.mssp.2018.12.031
ISSN1369-8001
Citation KeyOliveiraVieiSilv:2019:EnAcGa
TitleEnhancement of acetylene gas sensing properties for a ZnO-based gas sensorproduced by plasma immersion ion implantation and deposition
Year2019
MonthApr.
Access Date2024, May 08
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size1283 KiB
2. Context
Author1 Oliveira, Rogério de Moraes
2 Vieira, Maxton S.
3 Silva, Matheus M. N. F.
Resume Identifier1 8JMKD3MGP5W/3C9JJ6L
Group1 LABAP-COCTE-INPE-MCTIC-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Federal da Bahia (IFBA)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 rogerio.oliveira@inpe.br
JournalMaterials Science in Semiconductor Processing
Volume93
Pages339-344
Secondary MarkA2_ENGENHARIAS_IV B5_ASTRONOMIA_/_FÍSICA
History (UTC)2019-02-07 15:04:36 :: simone -> administrator :: 2019
2020-01-06 11:42:08 :: administrator -> simone :: 2019
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
KeywordsZnO-based gas sensor
Plasma immersion ion implantation
Fast time response
High sensitivity
Low working temperature
AbstractZinc oxide (ZnO) based gas sensors with sensitivities reaching 90% and time responses as low as two seconds foracetylene sensing (1 vol%), were produced by means of plasma immersion ion implantation and deposition (PIII&D). In the process, after the generation of an argon glow discharge, metallic zinc is vaporized, partially ionizedand implanted/deposited into/onto silicon substrates without the aid of catalysts or buffer layers. Calcination isperformed after treatment in atmospheric pressure at 500 °C, for 10 h, leading to the achievement of poly-crystalline ZnO nanostructures. The resistance change of the sensor was monitored by varying the respectiveworking temperature from 140 °C up to 280 °C for three different acetylene concentrations (1, 2, 3 vol%). Besidesthe high sensitivity and the fast response time, the recovery time was also measured and the repeatability of thesensor was tested by feeding and cutting the working gas supply into the measuring system at regular timeintervals.
AreaFISPLASMA
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAP > Enhancement of acetylene...
doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Content
agreement.html 07/02/2019 13:03 1.0 KiB 
4. Conditions of access and use
Languageen
Target FileOliveira_enhancement.pdf
User Groupsimone
Visibilityshown
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Next Higher Units8JMKD3MGPCW/3ET2RFS
Host Collectionurlib.net/www/2017/11.22.19.04
6. Notes
Empty Fieldsalternatejournal archivingpolicy archivist callnumber copyholder copyright creatorhistory descriptionlevel dissemination e-mailaddress format isbn label lineage mark mirrorrepository nextedition notes number orcid parameterlist parentrepositories previousedition previouslowerunit progress project readergroup rightsholder schedulinginformation secondarydate secondarykey session shorttitle sponsor subject tertiarymark tertiarytype url
7. Description control
e-Mail (login)simone
update 


Close